Piezoelectric microelectromechanical systems — challenges and opportunities
نویسندگان
چکیده
منابع مشابه
Processing and Characterization of Piezoelectric Materials into MicroElectroMechanical Systems
The Pb(Zr, Ti)O3 (PZT) based micro electro mechanical systems are presented. Piezoelectric effect, basic piezoelectric equations are explained. Lost silicon mold process for PZT microstructures, PZT thin film deposition, and PZT based piezoelectric micromachined switch device are discussed.
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2010
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2010.09.148